EM-Tec Quartz Crystals for Thickness Monitors/Controllers
EM-Tec Quartz Crystals for Thickness Monitors / Controllers
The EM-Tec Quartz crystals are particularly suited for thickness monitors, thickness controllers and quartz crystal microbalances (QCM) used with SEM sputter coaters and EM carbon evaporation systems and vacuum deposition systems. These plano-convex crystals are available in two sizes:
- Popular 14.0mm (0.55”) in diameter and compatible with thickness measurement, controller and QCM systems using a 6MHz sensor.
- Smaller 12.5mm (0.49”) in diameter and compatible with systems using a 5 MHz sensor
These quartz crystals are used on sputter coaters, carbon coaters and vacuum deposition systems from: Cressington, Agar, Bal-Tec, Denton, Emitec, Edwards, JEOL, Leica, Polaron, Quorum and Safe-matic. The EM-Tec quartz crystals are packaged in a flat pack carousel which contains 10 each QCM crystals.
The EM-Tec quartz crystals are available with two types of coating for the electrodes:
- Gold electrode is standard and recommended for low film stress deposition materials such as Gold, Silver, Palladium, Gold/Palladium, Platinum/Palladium, Copper
- Silver electrode is recommended for high film stress deposition materials such as Chromium, Nickel, Platinum, Iridium, Carbon.
Product # |
64-010855 |
64-010857 |
64-010851 |
64-010853 |
Frequency |
6 MHz |
5 Mhz |
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Shape |
Plano-convex |
Plano-convex |
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Substrate material |
Quartz |
Quartz |
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Electrode |
Gold |
Silver |
Gold |
Silver |
Diameter |
14mm / 0.55” |
12.5mm / 0.49” |
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Thickness |
0.27mm |
0.27mm |
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Packaging |
Carousel/10 |
Carousel/10 |
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Application |
Low stress films |
High stress films |
Low stress films |
High stress films |
Ordering Information for EM-Tec 6MHZ / 14.0mm Quartz Crystals for thickness monitor/controller systems
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Ordering Information for EM-Tec 5MHz / 12.5mm Quartz Crystals for thickness monitor/controller systems
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