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EM-Tec silicon SEM finder grid substrate
144 individual, indexed fields for multiple samples and correlative microscopy


EM-Tec silicon SEM finder grid substrate

Introduction

The novel EM-Tec FG1 silicon SEM finder grid substrate consists of an a 12x12mm chrome deposited grid with a 1mm pitch on a conductive ultra-flat silicon substrate. The substrate is divided into 144 indexed fields of 1x1mm where each of the fields has a unique alphanumeric label in the lower right corner.  The alphanumeric label is easy to see with a magnifier, stereo microscope and/or SEM.  The grid produced is comparable with 25 mesh and is practical for larger particles or small samples mounted on the substrate in separate fields. The EM-Tec FG1 silicon SEM finder grid substrate is ideal for correlative microscopy since the position of the sample is easily located. Size of the EM-Tec FG1 is 12x12mm on a 12.5 x 12.5mm substrate. Primarily designed for SEM applications, but equally suitable for reflected light microscopy, AFM and Auger/SIMS.
This unique product has a number of advantages over engraved SEM stubs and the usual copper SEM finder grids:

  • Ultra-flat – no height differences such as with copper finder grids
  • Pattern is easily visible with unaided eye, SEM and light microscope
  • Each individual field indexed with an alphanumeric label
  • Low background signal for SEM imaging – similar to Si chips
  • Fine bright pattern over entire area – finer than engraved stubs
  • Sample size can be easily judged with the 1x1mm pattern in the background
  • Compatible with Ø12.7mm pin stubs, Ø12.2mm JEOL stubs and Ø15mm Hitachi stubs
  • Easy to mount on SEM and AFM stubs
  • Compatible with SEM, FIB, AFM, LM, XPS/ESCA, SIMS and Auger
  • Reusable – solvent resistant and plasma cleaning compatible

The EM-Tec FG1 silicon SEM finder grid substrate in packaged in a clean-room and shipped in a gel-box.

The EM-Tec FG1 finder grid is ideal for:

  • correlative, corroborative, collaborative and repetitive microscopy
  • multi-sample mounting for small samples
  • demonstration samples with quick finder grid
  • quick size estimation with the 1mm grid

Specifications of the pattern and the ultra-flat silicon wafer of the EM-Tec FG1 silicon finder grid:
Pattern size   12 x12 mm divided into 144 individual 1x1mm fields
Numbering  Each field has unique alphanumeric label in lowe right corner
Pattern/labels 75nm thick deposited Cr with 20µm line width, 80µm label height 
Substrate size 12.5x12.5mm
Orientation <100>
Type P (Boron)
Resistance 1-10 Ohm/cm
Grade Prime / CZ Virgin
Coating None, native oxide only
Thickness 675µm (+/- 20µm)
TTV ≤1.5µm
Warp ≤30µm


Technical Support Bulletin: EM-Tec FG1 silicon SEM finder grid substrate

Ordering Information

*Prices are without tax. Tax might be added in cart.    

EM-Tec FG-1 Silicon Finder Grid Substrate with 144 fields of 1x1mm EM-Tec FG-1 Silicon Finder Grid Substrate with 144 fields of 1x1mm

Product # Unit Price* Add to Quote / Cart
10-008144 each €22,50
Quantity Discount: 10 or more: €21,50 each
Qty:




 



SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sample storage
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Lab scissors
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Preparation mats & tiles
  Cleaning
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
  Calibration
  Plastic Transfer Pipettes