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Denka M-3 LaB6 EM cathodes
High brightness, direct replacement electron sources


Denka M-3 LaB6 EM cathodes

Denka M3 LaB6 cathode. LaB6 crystal with standard
90 degree angle and 15Ám round tip.
 


Introduction

The Denka M-3 LaB6 filaments are the industry standard, high quality LaB6 cathodes. The standard Denka M-3 LaB6 cathode includes a 90° tip angle and a 15µm round tip; this provides a high brightness source coupled with excellent stability.  Special version with  sharper 60° tip angle and smaller 5µm/10µm round tips are available for TEMs.
Denka uses the purest , highest quality LaB6 crystals for the Denka M-3 LaB6 cathodes. The Denka LaB6 tip provides a 10x higher brightness than the standard tungsten source, resulting in better resolution with clear images and less noise. The lifetime of the LaB6 cathode is much longer than a tungsten source providing a stable source over a longer period. See the electron source performance table for more details. The Denka LaB6 cathodes improve results when used for:

  • SEM for low voltage and long term EDS mapping applications
  • TEM imaging and analysis
  • Electron probe micro analyzers (EPMA or Microprobe)
  • E-beam lithography

The LaB6 sources require a higher vacuum than standard tungsten sources which generally requires an additional ion-getter pump at the electron source. The required vacuum is in the 10-7 mbar range.


Design and features of the Denka M-3 LaB6 EM cathodes
The Denka LaB6 EM cathode construction is similar to the tungsten cathodes. It uses the same base with tungsten wires attached to the contact pins. Instead of a full tungsten loop, the LaB6 crystal forms the tip with the tungsten wires cemented against the LaB6 crystal. In this design the LaB6 crystal is directly heated by the filament current through the tungsten wires and the LaB6 crystal. This unique construction has a number of features and benefits:

  • Interchangeability: Denka M-3 LaB6 cathodes are designed as direct replacement for tungsten filaments
  • Suitable for SEM and TEM
  • Direct heating design with tungsten wired cemented at the high purity LaB6 crystal
  • • High brightness; about 10x higher than tungsten filaments (even 20x for the sharper tips)
  • Stable sources; due to its durable and simple construction, the standard Denka M3 LaB6 comprises a stability of better than 3%/hour at 1550°C
  • Long life; at 10-7mbar vacuum and 1550°C operating temperature, 500-2000 hours lifetime can be expected for the standard M3 LaB6 cathode
  • Low vapour pressure; reduced evaporation loss
  • High melting point and stability at operating temperatures
  • Low work function of 2.66ev (compared to 4.7ev for tungsten)

Specifications of the Denka M-3 LaB6 EM cathodes
Please consult the following table for the correct type of LaB6 source for your SEM, TEM or Microprobe. The Denka LaB6 EM cathodes are available for FEI, Hitachi, JEOL, Amray, CamScan, Philips, Tescan, Zeiss, LEO, Cambridge Instruments and Leica electron microscopes...

Type

Stand tip

Sharp tip

Tip shape

90°cone angle with 15µm round tip

60°cone angle with 5µm round tip
60°cone angle with 10µm round tip

Brightness
Value

10x times than tungsten tip
1 x 106 A/cm2.Str

2x times than standard tip
2 x 106 A/cm2.Str

Saturation

Mono spot at around 1500°C

Mono spot at around 1500°C

Crossover

Small; 7-10µm

Small; 7-10µm

Angular distribution

Sharp; 1.6 x 10-2 rad

Sharp; 1.6 x 10-2 rad

Lifetime

Approx. 500 - 2000 hrs

Shorter than standard tip

Ease of operation

Moderate

Difficult due to spot adjustment

Stability

High, better than 3%/hr

Lower, due to smaller spot

Vacuum

10-7 mbar or better

10-7 mbar or better

Work function

2.66 ev

2.66 ev



Denka M-3 LaB6 EM cathode selection table

Electron Microscope Type or Filament base

Product number

Ceramic Disc mm

Pin Diameter  mm

Pin Pitch mm

AEI

14-AE3301

12.0

1.0

6.45

AmRay /AMR (except 1200 series)

14-AM3302

26.0

1.0

5.0

Cambridge Instruments (except S4-10)

14-AE3301

12.0

1.0

6.45

CamScan with AEI conversion

14-AE3301

12.0

1.0

6.45

FEI TEM and SEM

14-FP3303

26.0

1.0

5.0

Hitachi S-Type

14-HI3304

9.8

1.2

2.7

JEOL K-Type metal ring - SEM - standard tip

14-JL3308

28.0

1.2

8.0

JEOL K-Type metal ring - TEM - sharp tip

14-JL3318 / 14-JL3328

28.0

1.2

8.0

Leica

14-AE3301

12.0

1.0

6.45

LEO 400 and 1400 Series SEM

14-AE3301

12.0

1.0

6.45

LEO1450 (except AEI conversions)

14-ZS3310

19.8

1.0

5.0

LEO TEM

14-ZS3310

19.8

1.0

5.0

Philips TEM and SEM (except XL-30)

14-FP3303

26.0

1.0

5.0

Tescan

14-TN3309

19.8

1.0

5.0

Zeiss DSM and TEM

14-ZS3310

19.8

1.0

5.0



Ordering Information for Denka M-3 LaB6 EM cathodes

*Prices are without tax. Tax might be added in cart.

Denka M3 LaB6 cathode, AEI Base, 90 degrees/15Ám round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 SEMs Denka M3 LaB6 cathode, AEI Base, 90 degrees/15Ám round tip for Zeiss EVO, LEO, Leica, CamScan, Cambridge Instruments and Philips XL-30 SEMs
Product # Unit Price* Add to Quote / Cart
14-AE3301 each €895,00
Qty:


Denka M3 LaB6 cathode, AmRay base, 90 degrees/15Ám round tip for all AMR Leitz/AMR and AmRay SEMs, except AMR 1200 serie Denka M3 LaB6 cathode, AmRay base, 90 degrees/15Ám round tip for all AMR Leitz/AMR and AmRay SEMs, except AMR 1200 serie
Product # Unit Price* Add to Quote / Cart
14-AM3302 each €995,00
Qty:


Denka M3 LaB6 cathode, FEI/Philips base, 90 degrees/15Ám round tip for FEI TEM/SEM and Philips EM200 TEM & PSEM 500 and later (except XL-30) Denka M3 LaB6 cathode, FEI/Philips base, 90 degrees/15Ám round tip for FEI TEM/SEM and Philips EM200 TEM & PSEM 500 and later (except XL-30)
Product # Unit Price* Add to Quote / Cart
14-FP3303 each €995,00
Qty:


Denka M3 LaB6 cathode, Hitachi S-Type base, 90 degrees/15Ám round tip for Hitachi S-, SU, H- and X-Series SEM and TEM Denka M3 LaB6 cathode, Hitachi S-Type base, 90 degrees/15Ám round tip for Hitachi S-, SU, H- and X-Series SEM and TEM
Product # Unit Price* Add to Quote / Cart
14-HI3304 each €895,00
Qty:


Standard Denka M3-LKS LaB6 cathode JEOL K-Type base with metal ring, 90 degrees/15Ám round tip for SEMs Standard Denka M3-LKS LaB6 cathode JEOL K-Type base with metal ring, 90 degrees/15Ám round tip for SEMs
Product # Unit Price* Add to Quote / Cart
14-JL3308 each €895,00
Qty:


Standard Denka M3-LKS LaB6 cathode JEOL K-Type base with metal ring, 90 degrees/15Ám round tip for SEMs Sharp Denka M3-LKSH60S LaB6 cathode, JEOL K-type Base with metal ring, 60 degrees/5Ám round tip for JEOL TEMs
Product # Unit Price* Add to Quote / Cart
14-JL3318 each €1130,00
Qty:


Standard Denka M3-LKS LaB6 cathode JEOL K-Type base with metal ring, 90 degrees/15Ám round tip for SEMs Sharp Denka M3-LKSH60 LaB6 cathode, JEOL K-type Base with metal ring, 60 degrees/10Ám round tip for JEOL TEMs
Product # Unit Price* Add to Quote / Cart
14-JL3328 each €1125,00
Qty:


Denka M3 LaB6 cathode, Tescan base, 90 degrees/15Ám round tip for Tescan SEMs Denka M3 LaB6 cathode, Tescan base, 90 degrees/15Ám round tip for Tescan SEMs
Product # Unit Price* Add to Quote / Cart
14-TN3309 each €895,00
Qty:


Denka M3 LaB6 cathode, Zeiss Base, 90 degrees/15μm round tip for DSM series SEMs, TEMs, LEO TEMs and LEO 1450 SEM Denka M3 LaB6 cathode, Zeiss Base, 90 degrees/15μm round tip for DSM series SEMs, TEMs, LEO TEMs and LEO 1450 SEM
Product # Unit Price* Add to Quote / Cart
14-ZS3310 each €895,00
Qty:



Electron Source Performance Table

The electron source performance table is porvided to give additional information into the performance and requirements for different type of electron emitters. Tungsten cathodes are still used in the majority in SEMs. Improved results can be obtained with LaB6 cathodes and the highest resolution can be obtained with either Schottky or cold Field Emission Sources

Emitter Type

Thermionic

Thermionic

Schottky FE

Cold FE

Cathode Material

W

LaB6

ZrO/W (100)

W (310)

Operating Temp (K)

2700

1800

1800

300

Cathode Radius (nm)

60,000

10,000

<1000

<100

Effective Source Radius (µm)

25

10

0.015

0.0025

Emission Current Density (A/cm2)

3

30

5300

17,000

Total Emission Current (µA)

200

80

200

5

Brightness (A/cm2.sr.kV)

1x104

1x105

1x107

2x107

Maximum Probe Current (nA)

1000

1000

10

0.2

Energy Spread @ Cathode (ev)

0.59

0.4

0.31

0.26

Energy Spread @ Source Exit (eV)

1.5 – 2.5

1.3 – 2.5

0.35 – 0.7

0.3 – 0.7

Beam Noise (%)

1

1

1

5 – 10

Emission Current Drift (%/h)

0.1

0.2

<0.5

5

Operating Vacuum (hPa/mbar)

<10-5

<10-6

<10-8

<10-10

Typical Cathode Life (h)

100

>1000

>5000

>2000

Cathode Regeneration (h)

None

None

None

6-12

Sensitivity to External Influences

Minimal

Low

Low

High


 




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sample storage
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Cryo Jug & Container
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Preparation mats & tiles
  Cleaning / Gloves
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
  Calibration
  Plastic Transfer Pipettes