product field
product field2
contact field
contact field2

Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
combines calibration and imaging quality assessment in a single standard



Introduction
                 31-T33600   Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field
                 31-T33600 Micro-Tec MTC-5 Multiple target
                 calibration standard with 4 patterns, Bright Field
                 order info

The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging,  optical quality control systems and low magnification SEM imaging for:

  • magnification calibration
  • critical dimension measurements
  • distortion correction
  • imaging quality assessment
  • quality control measurements.

There are four distinct patterns on the MTC-5 calibration standard:

  • Circle patterns from 10µm to 5mm diameter
  • Square patterns from 10x10µm to 5x5mm
  • Hexagon patterns from 10µm to 5mm across
  • Cross scale pattern of 5x5mm with 0.01mm divisions

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of tracebility is supplied with each standard. The MTC-5 is available in two versions:

  • MTC-5 with Cr lines on silicon for bright field imaging
  • MTCD-5 with inverted pattern (area between line coated with Cr) for dark field imaging

Specifications for the Micro-Tec MTC-5 multiple target calibrating graticule standards:

Substrate 525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive Excellent; 5-10 Ohm resistivity
Patterns Circles, squares, hexagons, cross scale
Pattern size 5 x 5mm (4x)
Lines  75nm thick, pure bright Chromium lines
5µm wide lines spaced 10, 25, 50, 75, 100, 125 and 150µum apart
10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart
20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart
Cross scale
pattern
5mm wide lines, 5 x 5mm with 0.01mm divisions
Die size 12 x 12mm
Application Reflective light, scanning electron microscopy, optical imaging systems
Identification Product ID with serial number etched
Mounting Unmounted, mounting optionally available
Supplied Supplied in a Gel-Pak box



Ordering Information for MTC-5 Multiple Target Graticule Calibration Standards

*Prices are without tax. Tax might be added in cart.


    # 31-T33600   Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field

Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field The Micro-Tec MTC-5 brigth field multiple target calibration standard comprises accurately deposited bright chromium lines on a conductive ultra-flat silicon substrate. The MTC-5 has been designed for calibrating reflective ligth microscopes, stereo microscopes, optical quality control systems and low magnification SEM imaging. The Micro-Tec MTC-5 incorporates four distinct patterns:

Circle patterns from 10Ám to 5mm diameter
Square patterns from 10x10Ám to 5x5mm
Hexagon patterns from 10Ám to 5mm across
Cross scale patterns of 5x5mm with 0.01mm divisions

The four chromium deposited patterns all in the same focus plane and provide a more superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard.
(More images)
Full list of available specimen mounts for calibration standard and test specimens

Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field
Product # Unit Price* Add to Quote / Cart
31-T33600-U Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, unmounted
Qty:

each €186,50
31-T33600-3 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub
Qty:

each €196,50
31-T33600-7 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub
Qty:

each €196,50
31-T33600-9 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub
Qty:

each €196,50
31-T33600-11 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on black microscope slide
Qty:

each €196,50
31-T33600-10 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, mounted on custom specimen stub
Qty:

each €286,50


    # 31-T33700   Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field

Micro-Tec MTCD-5  Multiple target calibration standard with 4 patterns, Dark Field The MTCD-5 dark field multiple target calibration standard comprised four inverted patterns; chromium deposited area with features left undeposited showing the silicon substrate. Designed for dark field applications in reflected light microscopy, optical quality control systems and low magnification SEM imaging. The large chromium coated are can also be used to assess the ability of optical systems to distinguish features in high brightness and high reflection applications. Patterns are: Inverted circle patterns from 10Ám to 5mm diameter Inverted square patterns from 10x10Ám to 5x5mm Inverted hexagon patterns from 10Ám to 5mm across Inverted cross scale patterns of 5x5mm with 0.01mm divisions. The four chromium deposited patterns all in the same focus plane and provide more a superior signal compared to etched patterns. The Micro-Tec MTC-5 is a NIST traceable standard. Example of wafer level certificate of traceability for the Micro-Tec MTC-5 multiple target calibration standard
(More images)
Full list of available specimen mounts for calibration standard and test specimens

Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, Dark Field
Product # Unit Price* Add to Quote / Cart
31-T33700-U Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, unmounted
Qty:

each €186,50
31-T33700-3 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on 25.4mm pin stub
Qty:

each €196,50
31-T33700-7 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted op 25mm JEOL stub
Qty:

each €196,50
31-T33700-9 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on 25mm Hitachi stub
Qty:

each €196,50
31-T33700-11 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on black microscope slide
Qty:

each €196,50
31-T33700-10 Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, mounted on custom specimen stub
Qty:

each €286,50

 

 




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sample storage
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Cryo Jug & Container
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Preparation mats & tiles
  Cleaning / Gloves
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
  Calibration
  Plastic Transfer Pipettes