product field
product field2
contact field
contact field2

EM-Tec wafer holders for SEM
compatible with either wafers with a flat or with a notch


EM-Tec wafer holders for SEM

Introduction

The EM-Tec wafer holders are specially designed to hold semi-conductor wafer in sizes of 51mm, 76mm, 100mm, 150mm and 200mm diameter (2 inch, 3inch, 4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers. Made from vacuum compatible aluminium and self-lubricating brass.


Unique features of the EM-Tec wafer holders:

  1. low profile, weight balanced support disc
  2. square cut-outs for wafer tweezers
  3. adjustable spring tension
  4. adjustable for non-standard wafers
  5. self-lubricating locking slide
  6. compatible with either wafers with a notch or wafers with a flat
  7. compatible with EM-Tec stage adapters for all SEM platforms

Available with:

  • standard pin to fit on SEMs which use the standard pin; FEI, Philips, Zeiss, LEO, Leica, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, CamScan, ETEC and Novascan SEMs.
  • M4 threaded hole; compatible with Hitachi SEMs, FESEMs and table top SEMs and with the EM-Tec versatile SEM stage adapters
  • Ø14mm JEOL stub compatible with JEOL and EM-Tec stage adapters with a Ø14mm connection

Capacity and dimensions for the  EM-Tec wafer holders:

Product #

Type

Wafer sizes

Dimensions w/o pin

Securing methode

SEM stage comp.

12-000282

W2

51mm / 2”

Ø76x18mm

Springloaded slide

Standard 3.2mm pin

12-000382

W2

51mm / 2”

Ø76x18mm

Springloaded slide

M4 thread

12-000682

W2

51mm / 2”

Ø76x18mm

Springloaded slide

Ø14mm JEOL stub

12-000293

W3

76mm / 3”

Ø76x18mm

Springloaded slide

Standard 3.2mm pin

12-000393

W3

76mm / 3”

Ø76x18mm

Springloaded slide

M4 thread

12-000693

W3

76mm / 3”

Ø76x18mm

Springloaded slide

Ø14mm JEOL stub

12-000284

W4

100mm / 4”

Ø106x16mm

Springloaded slide

Standard 3.2mm pin

12-000384

W4

100mm / 4”

Ø106x16mm

Springloaded slide

M4 thread

12-000684

W4

100mm / 4”

Ø106x16mm

Springloaded slide

14mm JEOL stub

12-000286

W6

150/mm / 6”

Ø156x16mm

Springloaded slide

Standard 3.2mm pin

12-000386

W6

150mm / 6”

Ø156x16mm

Springloaded slide

M4 thread

12-000686

W6

150mm / 6”

Ø156x16mm

Springloaded slide

Ø14mm JEOL stub

12-000288

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Standard 3.2mm pin

12-000388

W8

200mm / 8”

Ø206x16mm

Springloaded slide

M4 thread

12-000688

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Ø14mm JEOL stub



Ordering Information for EM-Tec wafer holders for SEMs using pin stubs; FEI, Philips, Zeiss, LEO, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, Leica, CamScan, Aspex, ETEC and Novascan SEMs.


*Prices are without tax. Tax might be added in cart.

EM-Tec W2 wafer holder for 51mm / 2inch wafers, pin EM-Tec W2 wafer holder for 51mm / 2inch wafers, pin

Product # Unit Price* Add to Quote / Cart
12-000282 each €279,50
Qty:


EM-Tec W3 wafer holder for 76mm / 3 inch wafers, pin EM-Tec W3 wafer holder for 76mm / 3 inch wafers, pin

Product # Unit Price* Add to Quote / Cart
12-000293 each €279,50
Qty:


EM-Tec W4 wafer holder for 100mm / 4inch wafers, pin EM-Tec W4 wafer holder for 100mm / 4inch wafers, pin

Product # Unit Price* Add to Quote / Cart
12-000284 each €299,50
Qty:


EM-Tec W6 wafer holder for 150mm / 6inch wafers, pin EM-Tec W6 wafer holder for 150mm / 6inch wafers, pin

Product # Unit Price* Add to Quote / Cart
12-000286 each €329,50
Qty:


EM-Tec W8 wafer holder for 200mm / 8inch wafers, pin EM-Tec W8 wafer holder for 200mm / 8inch wafers, pin

Product # Unit Price* Add to Quote / Cart
12-000288 each €349,50
Qty:




Ordering Information for EM-Tec wafer holders for Hitachi SEMs and the versatile EM-Tec stage SEM stage adapters


*Prices are without tax. Tax might be added in cart.

EM-Tec W2 wafer holder for 51mm / 2inch wafers, M4 EM-Tec W2 wafer holder for 51mm / 2inch wafers, M4

Product # Unit Price* Add to Quote / Cart
12-000382 each €275,00
Qty:


EM-Tec W3 wafer holder for 76mm / 3 inch wafers, M4 EM-Tec W3 wafer holder for 76mm / 3 inch wafers, M4

Product # Unit Price* Add to Quote / Cart
12-000393 each €275,00
Qty:


EM-Tec W4 wafer holder for 100mm / 4inch wafers, M4 EM-Tec W4 wafer holder for 100mm / 4inch wafers, M4

Product # Unit Price* Add to Quote / Cart
12-000384 each €295,00
Qty:


EM-Tec W6 wafer holder for 150mm / 6inch wafers, M4 EM-Tec W6 wafer holder for 150mm / 6inch wafers, M4

Product # Unit Price* Add to Quote / Cart
12-000386 each €325,00
Qty:


EM-Tec W8 wafer holder for 200mm / 8inch wafers, M4 EM-Tec W8 wafer holder for 200mm / 8inch wafers, M4

Product # Unit Price* Add to Quote / Cart
12-000388 each €345,00
Qty:




Ordering Information for EM-Tec wafer holders for JEOL stage SEM stage adapters with 14mm connection


*Prices are without tax. Tax might be added in cart.

EM-Tec W2 wafer holder for 51mm / 2inch wafers, 14mm JEOL stub EM-Tec W2 wafer holder for 51mm / 2inch wafers, 14mm JEOL stub

Product # Unit Price* Add to Quote / Cart

EM-Tec W3 wafer holder for 76mm / 3 inch wafers, 14mm JEOL stub EM-Tec W3 wafer holder for 76mm / 3 inch wafers, 14mm JEOL stub

Product # Unit Price* Add to Quote / Cart

EM-Tec W4 wafer holder for 100mm / 4 inch wafers, 14mm JEOL stub EM-Tec W4 wafer holder for 100mm / 4 inch wafers, 14mm JEOL stub

Product # Unit Price* Add to Quote / Cart
12-000684 each €299,50
Qty:


EM-Tec W6 wafer holder for 150mm / 6inch wafers, 14mm JEOL stub EM-Tec W6 wafer holder for 150mm / 6inch wafers, 14mm JEOL stub

Product # Unit Price* Add to Quote / Cart
12-000686 each €329,50
Qty:


EM-Tec W8 wafer holder for 200mm / 8inch wafers, 14mm JEOL stub EM-Tec W8 wafer holder for 200mm / 8inch wafers, 14mm JEOL stub

Product # Unit Price* Add to Quote / Cart
12-000688 each €349,50
Qty:






SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  SEM Preparation Stands
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sample storage
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Cryo Jug & Container
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools / Scissors
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Preparation mats & tiles
  Cleaning / Gloves
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
  Calibration
  Plastic Transfer Pipettes