EM-Tec S-Clip SEM sample holders
EM-Tec SEM stage adapters
EM-Tec bulk specimen holders

EM-Tec wafer holders for SEM
compatible with either wafers with a flat or with a notch

•               
• EM-Tec wafer holders with pin  |
  • EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, pin
  • EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, pin
  • EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, pin
  • EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, pin
  • EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, pin
• EM-Tec wafer holders with M4  |
  • EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, M4
  • EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, M4
  • EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, M4
  • EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, M4
  • EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, M4
• EM-Tec with wafer holders with 14mm JEOL stub 
  • EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, Ø14mm JEOL stub
  • EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, Ø14mm JEOL stub
  • EM-Tec W4 wafer holder for Ø100mm / 4 inch wafers, Ø14mm JEOL stub
  • EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, Ø14mm JEOL stub
  • EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, Ø14mm JEOL stub

Introduction

The EM-Tec wafer holders are specially designed to hold semi-conductor wafer in sizes 51mm, 76mm, 100mm, 150mm and 200mm diameter (2 inch, 3inch, 4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers. Made from vacuum compatible aluminium and self-lubricating brass with stainless steel spring, guiding pin and set screw.

Unique features of the EM-Tec wafer holders:

1. low profile, weight balanced support disc
2. square cut-outs for wafer tweezers
3. adjustable spring tension
4. adjustable for non-standard wafers
5. self-lubricating locking slide
6. compatible with either wafers with a notch or wafers with a flat
7. compatible with EM-Tec stage adapters for all SEM platforms

Available with:

• standard pin to fit on SEMs which use the standard pin; TFS, FEI, Philips, Zeiss, LEO, Leica, Tescan, AmRay, Cambridge Instruments, CamScan, ETEC and Novascan SEMs.
• M4 threaded hole; compatible with Hitachi SEMs, FESEMs and with the EM-Tec versatile SEM stage adapters
• Ø14mm JEOL stub compatible with JEOL and EM-Tec stage adapters with a Ø14mm connection

Capacity and dimensions for the  EM-Tec wafer holders:

Product #	Type	Wafer sizes	Dimensions w/o pin	Securing methode	SEM stage comp.
12-000282	W2	51mm / 2”	Ø76x18mm	Springloaded slide	Standard 3.2mm pin
12-000382	W2	51mm / 2”	Ø76x18mm	Springloaded slide	M4 thread
12-000682	W2	51mm / 2”	Ø76x18mm	Springloaded slide	Ø14mm JEOL stub
12-000293	W3	76mm / 3”	Ø76x18mm	Springloaded slide	Standard 3.2mm pin
12-000393	W3	76mm / 3”	Ø76x18mm	Springloaded slide	M4 thread
12-000693	W3	76mm / 3”	Ø76x18mm	Springloaded slide	Ø14mm JEOL stub
12-000284	W4	100mm / 4”	Ø106x16mm	Springloaded slide	Standard 3.2mm pin
12-000384	W4	100mm / 4”	Ø106x16mm	Springloaded slide	M4 thread
12-000684	W4	100mm / 4”	Ø106x16mm	Springloaded slide	Ø14mm JEOL stub
12-000286	W6	150/mm / 6”	Ø156x16mm	Springloaded slide	Standard 3.2mm pin
12-000386	W6	150mm / 6”	Ø156x16mm	Springloaded slide	M4 thread
12-000686	W6	150mm / 6”	Ø156x16mm	Springloaded slide	Ø14mm JEOL stub
12-000288	W8	200mm / 8”	Ø206x16mm	Springloaded slide	Standard 3.2mm pin
12-000388	W8	200mm / 8”	Ø206x16mm	Springloaded slide	M4 thread
12-000688	W8	200mm / 8”	Ø206x16mm	Springloaded slide	Ø14mm JEOL stub

Technical Support Bulletin: EM-Tec W2 / W3 / W4 / W6 / W8 wafer holders for SEM

Ordering Information for EM-Tec wafer holders for SEMs using pin stubs; TFS, FEI, Philips, Tescan, Phenom, Aspex, RJLee, AmRay, Cambridge Instruments, Leica and CamScan SEMs

EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, pin Product # Unit Price* Add to Quote / Order 12-000282 each €297,50 Qty:

EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, pin Product # Unit Price* Add to Quote / Order 12-000293 each €297,50 Qty:

EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, pin Product # Unit Price* Add to Quote / Order 12-000284 each €347,50 Qty:

EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, pin Product # Unit Price* Add to Quote / Order 12-000286 each €377,50 Qty:

EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, pin Product # Unit Price* Add to Quote / Order 12-000288 each €418,50 Qty:

Ordering Information for EM-Tec wafer holders for Hitachi SEMs and the versatile EM-Tec stage SEM stage adapters

EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, M4 Product # Unit Price* Add to Quote / Order 12-000382 each €295,00 Qty:

EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, M4 Product # Unit Price* Add to Quote / Order 12-000393 each €295,00 Qty:

EM-Tec W4 wafer holder for Ø100mm / 4inch wafers, M4 Product # Unit Price* Add to Quote / Order 12-000384 each €345,00 Qty:

EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, M4 Product # Unit Price* Add to Quote / Order 12-000386 each €375,00 Qty:

EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, M4 Product # Unit Price* Add to Quote / Order 12-000388 each €415,00 Qty:

Ordering Information for EM-Tec wafer holders for JEOL stage SEM stage adapters with 14mm connection

EM-Tec W2 wafer holder for Ø51mm / 2inch wafers, Ø14mm JEOL stub Product # Unit Price* Add to Quote / Order 12-000682 each €297,50 Qty:

EM-Tec W3 wafer holder for Ø76mm / 3 inch wafers, Ø14mm JEOL stub Product # Unit Price* Add to Quote / Order 12-000693 each €297,50 Qty:

EM-Tec W4 wafer holder for Ø100mm / 4 inch wafers, Ø14mm JEOL stub Product # Unit Price* Add to Quote / Order 12-000684 each €347,50 Qty:

EM-Tec W6 wafer holder for Ø150mm / 6inch wafers, Ø14mm JEOL stub Product # Unit Price* Add to Quote / Order 12-000686 each €377,50 Qty:

EM-Tec W8 wafer holder for Ø200mm / 8inch wafers, Ø14mm JEOL stub Product # Unit Price* Add to Quote / Order 12-000688 each €418,50 Qty:

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