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EM-Tec Disc or Annular Sputter Targets for EM Sputter Coaters
High Quality, High Purity Sputter Targets



Introduction

The high purity EM-Tec sputter targets are compatible with a wide variety of desk top sputter coaters. The sputter coaters are used to sputter a very thin layer of conductive metal on non-conductive sample in order to investigate these samples with a scanning electron microscope (SEM). The EM-Tec sputter targets are compatible with the following sputter coaters,  ion beam coaters or cryo-SEM preparation systems brands: Agar, Anatech/Technics, Bal-Tec, Bio-Rad, Cressington, Denton, Edwards, Emitech, EMS, Emscope, Fisons, Gatan, Hummer, ISI, JEOL, Leica, Polaron, Quorum, Safematic, SPI, Thermo and VG Microtech. Targets are relatively expensive due to the high purity of the precious metals which require multiple refining steps. A purity of 99.99% or close is desired to avoid any artefacts either in imaging or with EDX analysis. The target material you are using because it is installed in the sputter coater might not be best choice and there are alternatives for many applications. Depending on your application, there is a choice of coating materials, see: Practical Information Selecting Target Material To Coat SEM Samples.


EM-Tec Disc Type Sputter Targets

   EM-Tec Disc or Annular Targets for EM Sputter Coaters
 

The EM-Tec disc type sputter targets are made using high purity metal foils and are available in 60, 57, 54, 50 and 19mm diameter. Disc type sputter targets are widely used is all brands of sputter coaters. Most modern sputter coaters use a clamping ring to hold the target. Some older systems use a target support plate where the target needs to be bonded with the target plate by using silver paint or Indium. Use the EM-Tec Disc Sputter Target Selection Table to determine the target size for your coater (alternatively measure the target in your sputter coater) or go directly to ordering information for the target size:

- 60mm disc type high purity EM-Tec sputter targets for sputter coaters
- 57mm disc type high purity EM-Tec sputter targets for sputter coaters
- 54mm disc type high purity EM-Tec sputter targets for sputter coaters
- 50mm disc type high purity EM-Tec sputter targets for sputter coaters
- 24mm disc type high purity EM-Tec sputter targets for cryo-SEM preparation systems
- 19mm disc type high purity EM-Tec sputter targets for Gatan ion beam sputter coaters


EM-Tec Disc Type Sputter Target Selection Table

Manufacturer

Models

60mm

57mm

54mm

50mm

Ø24mm

19mm

Agar

Manual / Automatic

 

X

 

 

 

 

Anatech/Technics

Hummer I / II / III / Jr

 

 

 

X

 

 

Bal-Tec

SCD 005 / 040 / 050 / 500

 

 

X

 

 

 

Bal-Tec

MED 10 / MED 20

 

 

 

 

 

 

Bio-Rad

SC5200 / SC502

 

X

 

 

 

 

Bio-Rad E7400 / LT7400         X  

Cressington

108manual / 108auto

 

X

 

 

 

 

Cressington

108auto/SE

 

X

 

 

 

 

Cressington

208HR

 

X

 

 

 

 

Denton

Desk II / II / IV / V

X

 

 

 

 

 

Edwards

150B / Scancoat

X

 

 

 

 

 

Emitech

SC7620 / SC7610

 

X

 

 

 

 

Emitech

K500X / K550X /  K650X

X

 

 

 

 

 

Emitech

K575XD / K675X / K675XD

 

 

 

 

 

Emitech

K575X / Q150

 

X

 

 

 

 

EMS

150R / 300R / SC7620

 

X

 

 

 

 

Emscope

SC502

 

X

 

 

 

 

Fullam

EffaCoater / EMS-76

 

 

 

X

 

 

Gatan

681 Ion Beam Coater

 

 

 

 

 

X

Gatan

682 PECS Ion Beam Coater

 

 

 

 

 

X

Gatan

685 PECS II Ion Beam Coater

 

 

 

 

 

X

HHV

BT150 / BT300

 

 

 

 

HoYeon

HC21

 

X

 

 

 

 

ISI

ISI 5400

 

X

 

 

 

 

JEOL

JFC-1200 / 1300 / 1400 / 1600

 

X

 

 

 

 

JEOL

JFC-2300HR

 

X

 

 

 

 

Leica

EM SCD 005 / 050 / 500

 

 

X

 

 

 

Leica

EM MED 020

 

 

X

 

 

 

Leica

ACE 200 / ACE 600

 

 

X

 

 

 

Pelco

SC4 / SC5 /  SC6  / SC7

 

X

 

 

 

 

Polaron / Bio-Rad

E5000 / E5200 / E5400 / E5800

 

X

 

 

 

 

Polaron / Bio-Rad

PS 3

 

X

 

 

 

 

Polaron / Quorum

SC7620 / SC7610

 

X

 

 

 

 

Quorum

Q150R / Q150T / SC7620

 

X

 

 

 

 

Quorum

Q300R / Q300T

 

X

 

 

 

 

Quorum PP2000 / PP2000T         X  
Quorum PP3000T / PP3010T          
Safematic CCU-010     X      

SEC

MCM-100 / MCM-200

 

 

 

X

 

 

SPI

SPI-Module

 

X

 

 

 

 

SPI

SPI Super

 

 

 

X

 

 

VG Microtech / Fisons / Thermo PP2200 / PP2000T         X  
Note 1: Polaran coaters have also been sold under the Bio-Rad, Fisons, VG Microtech, Thermo VG, Emscope and Quorum brand.
Note 2: Thickness of the targets can vary between 0.1 and 3.2mm



Ordering Information EM-Tec Disc Targets

*Prices are without tax. Tax might be added in cart.

60mm disc type high purity EM-Tec sputter targets for sputter coaters 60mm disc type high purity EM-Tec sputter targets for sputter coaters:
Denton Desk II / III / IV /V, Edwards 150B / Scancoat, Emitech K500 / K550 / K650 and Emscope SC500.
Product # Unit Price* Add to Quote / Cart
70-AG6010 Silver Target, 60 x 0.25mm Disc, 99.97% Ag
Qty:

each €195,00
70-AL6010 Aluminium Target, 60 x 0.25mm Disc, 99.999% Al
Qty:

each €150,00
70-AP6004 Gold/Palladium Target, 60 x 0.1mm Disc, Au/Pd 60/40, 99.99% Au/Pd
Qty:

each €565,00
70-AP6005 Gold/Palladium Target, 60 x 0.1mm Disc, Au/Pd 80/20, 99.99% Au/Pd
Qty:

each €595,00
70-AP6008 Gold/Palladium Target, 60 x 0.2mm Disc, Au/Pd 60/40, 99.99% Au/Pd
Qty:

each €955,00
70-AP6009 Gold/Palladium Target, 60 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €985,00
70-AU6004 Gold Target, 60 x 0.1mm Disc, 99.99% Au
Qty:

each €595,00
70-AU6008 Gold Target, 60 x 0.2mm Disc, 99.99% Au
Qty:

each €995,00
70-CR6012 Chromium Target, 60 x 0.3mm Disc, 99.95% Cr
Qty:

each €575,00
70-CU6010 Copper target, 60 x 0.25mm Disc, 99.99% Cu
Qty:

each €150,00
70-IR6012 Iridium Target, 60 x 0.3mm Disc, 99.99% Ir
Qty:

each €2245,00
70-NI6003 Nickel Target, 60 x 0.075mm Disc, 99.98% Ni
Qty:

each €180,00
70-PD6004 Palladium Target, 60 x 0.1mm Disc, 99.99% Pd
Qty:

each €445,00
70-PD6008 Palladium Target, 60 x 0.2mm Disc, 99.99% Pd
Qty:

each €645,00
70-PP6004 Platinum/Palladium Target, 60 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €625,00
70-PP6008 Platinum/Palladium Target, 60 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €1045,00
70-PT6004 Platinum Target, 60 x 0.1mm Disc, 99.99% Pt
Qty:

each €645,00
70-PT6008 Platinum Target, 60 x 0.2mm Disc, 99.99% Pt
Qty:

each €1065,00
70-TI6010 Titanium Target, 60 x 0.25mm Disc, 99.6+% Ti
Qty:

each €145,00

57mm disc type high purity EM-Tec sputter targets for sputter coaters 57mm disc type high purity EM-Tec sputter targets for sputter coaters: Agar Manual / Auto, Cressington 108 / 108SE / 208HR, Emitech K575X / CS7620, SC7610, ISI 5400, JEOL JFC 1200 / 1300 / 1400 / 1600 / 2300HR, Pelco SC4 / SC5 / SC6 /SC7, Polaron 5000 / 5200 / 5400 / 5800, Quorum Q150 / Q300 / SC7620 and SPI Module.
Product # Unit Price* Add to Quote / Cart
70-AG5710 Silver Target, 57 x 0.25mm Disc, 99.97% Ag
Qty:

each €190,00
70-AL5710 Aluminium Target, 57 x 0.25mm Disc, 99.999% Al
Qty:

each €150,00
70-AP5704 Gold/Palladium Target, 57 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €555,00
70-AP5705 Gold/Palladium Target, 57 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €565,00
70-AP5708 Gold/Palladium Target, 57 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €925,00
70-AP5709 Gold/Palladium Target, 57 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €935,00
70-AU5704 Gold Target, 57 x 0.1mm Disc, 99.99% Au
Qty:

each €575,00
70-AU5708 Gold Target, 57 x 0.2mm Disc, 99.99% Au
Qty:

each €945,00
70-CR5712 Chromium Target, 57 x 0.3mm Disc, 99.95% Cr
Qty:

each €490,00
70-CR5799 Chromium Target, 57 x 3.2mm Disc, 99.95% Cr
Qty:

each €550,00
70-CU5710 Copper Target, 57 x 0.25mm Disc, 99.99% Cu
Qty:

each €150,00
70-IR5712 Iridium Target, 57 x 0.3mm Disc, 99.99% Ir
Qty:

each €2190,00
70-IT7099 ITO (Indium Tin Oxide) Target 57 x 3.0mm Disc, including 1mm thick copper backing plate, 90/10 Wt% In2O3/SnO2, 99.99%
Qty:

each €1055,00
70-MO5710 Molydenum Target, 57 x 0.25mm Disc, 99.95% Mo
Qty:

each €195,00
70-NB5710 Niobium Target, 57 x 0.25mm Disc, 99.95% Nb
Qty:

each €205,00
70-NI5703 Nickel Target, 57 x 0.075mm, 99.98% Ni
Qty:

each €175,00
70-PD5704 Palladium Target, 57 x 0.1mm Disc, 99.99% Pd
Qty:

each €435,00
70-PD5708 Palladium Target, 57 x 0.2mm Disc, 99.99% Pd
Qty:

each €610,00
70-PP5704 Platinum/Palladium Target, 57 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €610,00
70-PP5708 Platinum/Palladium Target, 57 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €995,00
70-PT5704 Platinum Target, 57 x 0.1mm Disc, 99.99% Pt
Qty:

each €625,00
70-PT5708 Platinum Target, 57 x 0.2mm Disc, 99.99% Pt
Qty:

each €1035,00
70-TA5710 Tantalum Target, 57 x 0.25mm Disc, 99.95% Ta
Qty:

each €290,00
70-TI5710 Titanium Target, 57 x 0.25mm Disc, 99.6+% Ti
Qty:

each €140,00
70-WO5710 Tungsten Target, 57 x 0.25mm Disc, 99.95% W
Qty:

each €245,00

54mm disc type high purity EM-Tec sputter targets for sputter coaters 54mm disc type high purity EM-Tec sputter targets for sputter coaters : Bal-Tec SCD SCD005 / 040 / 050 / 500 / MD10 / MED20, LEICA EM SCD 005 / 050 / 500 / MED20 / ACE200 / ACE600, Emitech K575XD / K675X / K675XD.
Product # Unit Price* Add to Quote / Cart
70-AG5410 Silver Target, 54 x 0.25mm Disc, 99.97% Ag
Qty:

each €190,00
70-AL5410 Aluminium Target, 54 x 0.25mm Disc, 99.999% Al
Qty:

each €150,00
70-AP5404 Gold/Palladium Target, 54 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €545,00
70-AP5405 Gold/Palladium Target, 54 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €555,00
70-AP5408 Gold/Palladium Target, 54 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €915,00
70-AP5409 Gold/Palladium Target, 54 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €925,00
70-AU5404 Gold Target, 54 x 0.1mm Disc, 99.99% Au
Qty:

each €570,00
70-AU5408 Gold Target, 54 x 0.2mm Disc, 99.99% Au
Qty:

each €940,00
70-CR5420 Chromium Target, 54 x 0.5mm Disc, 99.95% Cr
Qty:

each €495,00
70-CU5410 Copper Target, 54 x 0.25mm Disc, 99.99% Cu
Qty:

each €150,00
70-IR5412 Iridium Target, 54 x 0.3mm Disc, 99.99% Ir
Qty:

each €2090,00
70-NI5403 Nickel Target, 54 x 0.075mm Disc, 99.98% Ni
Qty:

each €175,00
70-PD5404 Palladium Target, 54 x 0.1mm Disc, 99.99% Pd
Qty:

each €430,00
70-PD5408 Palladium Target, 54 x 0.2mm Disc, 99.99% Pd
Qty:

each €600,00
70-PP5404 Platinum/Palladium Target, 54 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €605,00
70-PP5408 Platinum/Palladium Target, 54 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €990,00
70-PT5404 Platinum Target, 54 x 0.1mm Disc, 99.99% Pt
Qty:

each €620,00
70-PT5408 Platinum Target, 54 x 0.2mm Disc, 99.99% Pt
Qty:

each €1030,00
70-TI5410 Titanium Target, 54 x 0.25mm Disc, 99.6+% Ti
Qty:

each €140,00

50mm disc type high purity EM-Tec sputter targets for sputter coaters 50mm disc type high purity EM-Tec sputter targets for sputter coaters:
Anatech/Technics Hummer I / II /III, Fullam EffaCoater / EMS-76, SEC MCM-100 / MCM-200 and SPI Super.
Product # Unit Price* Add to Quote / Cart
70-AG5010 Silver Target, 50 x 0.25mm Disc, 99.97% Ag
Qty:

each €188,00
70-AL5010 Aluminium Target, 50 x 0.25mm Disc, 99.999% Al
Qty:

each €150,00
70-AP5004 Gold/Palladium Target, 50 x 0.1mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €535,00
70-AP5005 Gold/Palladium Target, 50 x 0.1mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €545,00
70-AP5008 Gold/Palladium Target, 50 x 0.2mm Disc, 60/40 Au/Pd, 99.99% Au/Pd
Qty:

each €905,00
70-AP5009 Gold/Palladium Target, 50 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €915,00
70-AU5004 Gold Target, 50 x 0.1mm Disc, 99.99% Au
Qty:

each €595,00
70-AU5008 Gold Target, 50 x 0.2mm Disc, 99.99% Au
Qty:

each €935,00
70-CU5010 Copper Target, 50 x 0.25mm Disc, 99.99% Cu
Qty:

each €150,00
70-NI5003 Nickel Target, 50 x 0.075mm Disc, 99.98% Ni
Qty:

each €175,00
70-PD5004 Palladium Target, 50 x 0.1mm Disc, 99.99% Pd
Qty:

each €425,00
70-PP5004 Platinum/Palladium Target, 50 x 0.1mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €600,00
70-PP5008 Platinum/Palladium Target, 50 x 0.2mm Disc, 80/20 Pt/Pd 99.99% Pt/Pd
Qty:

each €985,00
70-PT5004 Platinum Target, 50 x 0.1mm Disc, 99.99% Pt
Qty:

each €615,00
70-PT5008 Platinum Target, 50 x 0.2mm Disc, 99.99% Pt
Qty:

each €1025,00
70-TI5010 Titanium Target, 50 x 0.25mm Disc, 99.6+% Ti
Qty:

each €140,00

24mm disc type high purity EM-Tec sputter targets for cryo-SEM preparation systems 24mm disc type high purity EM-Tec sputter targets for cryo-SEM preparation systems:
Bio-Rad E7400 / LT7400, Quorum PP2000 / PP2000T, PP3000T / PP3010T and VG MicroTech / Fisons / Thermo models PP2200 / PP2000T
Product # Unit Price* Add to Quote / Cart
70-AP2409 Gold/Palladium Target, 24 x 0.2mm Disc, 80/20 Au/Pd, 99.99% Au/Pd
Qty:

each €385,00
70-AU2408 Gold Target, 24 x 0.2mm Disc, 99.99% Au
Qty:

each €355,00
70-CR2412 Chromium Target, 57 x 0.3mm Disc, 99.95% Cr
Qty:

each €325,00
70-IR2412 Iridium Target, 24 x 0.3mm Disc, 99.99% Ir
Qty:

each €1150,00
70-PT2408 Platinum Target, 24 x 0.2mm Disc, 99.99% Pt
Qty:

each €365,00

19mm disc type high purity EM-Tec sputter targets for Gatan ion beam sputter coaters 19mm disc type high purity EM-Tec sputter targets for ion beam sputter coaters:
Gatan Models 681 / 682 PECS and 685 PECS II.
Product # Unit Price* Add to Quote / Cart
70-AG1960 Silver Target, 19 x 1.5mm Disc, 99.99% Ag
Qty:

each €365,00
70-AL1960 Aluminium Target, 19 x 1.5mm Disc, 99.999% Al
Qty:

each €190,00
70-AP1960 Gold/Palladium Target, 19 x 1.5mm Disc, Au/Pd 60/40, 99.99% Au/Pd
Qty:

each €995,00
70-AP1965 Gold/Palladium Target, 19 x 1.5mm Disc, Au/Pd 80/20, 99.99% Au/Pd
Qty:

each €995,00
70-AU1960 Gold Target, 19 x 1.5mm Disc, 99.99% Au
Qty:

each €1025,00
70-CC1960 Carbon (Graphite) Target, 19 x 1.5mm Disc, 99.99% C
Qty:

each €198,00
70-CR1960 Chromium Target, 19 x 1.5mm Disc, 99.95% Cr
Qty:

each €255,00
70-CU1960 Copper Target, 19 x 1.5mm Disc, 99.99% Cu
Qty:

each €190,00
70-IR1960 Iridium Target, 19 x 1.5mm Disc, 99.99% Ir
Qty:

each €1425,00
70-NB1960 Niobium Target, 19 x 1.5mm Disc, 99.95% Nb
Qty:

each €325,00
70-NI1960 Nickel Target, 19 x 1.5mm Disc, 99.98% Ni
Qty:

each €255,00
70-PD1960 Palladium Target, 19 x 1.5mm Disc, 99.99% Pd
Qty:

each €645,00
70-PP1960 Platinum/Palladium Target, 19 x 1.5mm Disc, Pt/Pd 80/20, 99.99% Pt/Pd
Qty:

each €1025,00
70-PT1960 Platinum Target, 19 x 1.5mm Disc, 99.99% Pt
Qty:

each €1085,00
70-TA1960 Tantalum Target, 19 x 1.5mm Disc, 99.95% Ta
Qty:

each €325,00
70-WO1960 Tungsten Target, 19 x 1.5mm Disc, 99.95% W
Qty:

each €325,00


   Annular Targets for EM Sputter Coaters
EM-Tec Annular Type Sputter Targets

Annular sputter targets are less common than the disc type sputter targets. They are used on the older Polaron sputter coaters and on the Anatech/Technics Hummer sputter coaters. For the annular targets, the target material is attached to an aluminum support ring and they are supplied as complete assemblies. Available as targets with pure gold, gold/palladium, platinum, platinum/palladium, silver, copper and nickel. There are two sizes offered:

- 82mm OD x 60mm ID annular type high purity EM-Tec sputter targets for sputter coaters
- 3inch OD x 2inch ID annular type high purity EM-Tec sputter targets for sputter coaters

Use the EM-Tec Annular Sputter Target Selection Table to determine the target size for your sputter coater (alternatively measure the target in your sputter coater) or go directly to the Ordering Information.


EM-Tec Annular Type Sputter Target Selection Table

Manufacturer

Models

82mm O.D. X 60mm I.D.

3” O.D. X 2” I.D.

Anatech / Technics

Hummer V / VI / 6.2 / 8

 

X

Polaron / Biorad

E5100 / SC510 / SC515

X

 

Polaron / Quorum

SC7640 / SC 7680

X

 

Note 1: Polaran coaters have also been sold under the Bio-Rad, Fisons, VG Microtech, Thermo VG, Emscope and Quorum brand.

 

Ordering Information for EM-Tec Annular Type Sputter Targets

*Prices are without tax. Tax might be added in cart.

82mm OD x  60mm ID annular type high purity EM-Tec sputter targets for sputter coaters 82mm OD x 60mm ID annular type high purity EM-Tec sputter targets for sputter coaters:
Polaron / Biorad E5100 / SC510 / SC515 and Polaron / Quorum SC7640 / 7680.
Product # Unit Price* Add to Quote / Cart
70-AG8212 Silver Target, 82 x 60 x 0.3mm Annular on Support Ring, 99.99% Ag
Qty:

each €650,00
70-AP8204 Gold/Palladium Target, 82 x 60 x 0.1mm Annular on Support Ring, Au/Pd 60/40, 99.99% Au/Pd
Qty:

each €820,00
70-AP8205 Gold/Palladium Target, 82 x 60 x 0.1mm Annular on Support Ring, Au/Pd 80/20, 99.99% Au/Pd
Qty:

each €875,00
70-AU8204 Gold Target, 82 x 60 x 0.1mm Annular on Support Ring, 99.99% Au
Qty:

each €920,00
70-CU8212 Copper Target, 82 x 60 x 0.3mm Annular on Support Ring, 99.99% Cu
Qty:

each €600,00
70-PD8204 Palladium Target, 82 x 60 x 0.1mm Annular on Support Ring, 99.99% Pd
Qty:

each €725,00
70-PT8204 Platinum Target, 82 x 60 x 0.1mm Annular on Support Ring, 99.99% Pt
Qty:

each €970,00

3inch OD x  2inch ID annular type high purity EM-Tec sputter targets for sputter coaters 3inch OD x 2inch ID annular type high purity EM-Tec sputter targets for sputter coaters:
Anatech / Technics Hummer V / VI / 6.2 / 8.
Product # Unit Price* Add to Quote / Cart
70-AG7612 Silver Target, 3inch x 2inch x 0.3mm Annular on Support Ring, 99.99% Ag
Qty:

each €650,00
70-AP7604 Gold/Palladium Target, 3inch x 2inch x 0.1mm Annular on Support Ring, Au/Pd 60/40, 99.99% Au/Pd
Qty:

each €820,00
70-AU7604 Gold Target, 3inch x 2inch x 0.1mm Annular on Support Ring, 99.99%. Au
Qty:

each €920,00
70-CU7612 Copper Target, 3inch x 2inch x 0.3mm Annular on Support Ring, 99.99% Cu
Qty:

each €600,00
70-PD7604 Palladium Target, 3inch x 2inch x 0.1mm Annular on Support Ring, 99.99% Pd
Qty:

each €725,00
70-PT7604 Platinum Target, 3inch x 2inch x 0.1mm Annular on Support Ring, 99.99% Pt
Qty:

each €970,00


Practical Information on Selecting a Target Material to coat SEM Samples

Selection of the optimum coating material depends on the (non-conductive) sample, the application and cost. Most SEM sputter coaters allow for a relatively easy target change. When using different coating (target) materials than Gold, the use of Argon as process gas is paramount. One should be aware that each sample material behaves differently when coated. The coating quality is obviously affected by the target material and by the interaction of the sample material and metal used for the coating. Coating the SEM sample with a (highly conductive) metal makes non-conductive SEM samples conductive. An additional benefit is that most coating materials have a higher secondary electron (SE) yield than the non conductive sample material. Coating material with lower atomic numbers is more suitable for for backscattered electron (imaging) whereas coating with higher atomic numbers is more suitable for SE imaging. Below you will find some pratical guidance information for selecting the target material. The information is only valid when using modern DC magnetron SEM sputter coaters and Argon as process gas.
If EDX analysis of the sample is needed, always choose a coating (target) material which is not present in the sample, creates overlapping peaks in the EDX spectrum or otherwise interferes with the EDX analysis.


Gold

Gold is an excellent and most widely used coating material to coat non-conductive samples for standard SEM applications. Due to the low work function it is a very efficient to coat and when using cool sputter coaters and thin layers, there is hardly any heating of the sample surface. The grain size is visible when using high magnifications on modern SEMs. Gold can be used for table top SEMs with air as process gas.


Gold/Palladium

The Au/Pd  alloy (60/40) is less efficient to coat than with pure gold, which results in lower sputter rates. Au/Pd is often recommended to achieve a smaller grain size. Au/Pd gives smaller grain sizes when evaporated in high vacuum, but when used in SEM sputter coaters the difference between Au and Au/Pd is hardly visisble. Less suitable for heat sensitive specimens and less suitable for EDX analysis due to the extra set of peaks for Pd.


Silver

Ag is a most suitable and low cost alternative for Au in many imaging applications for low and medium magnifications ranges. It is a widely underestimated coating material. Ag has the highest conductivity of all metals. When using EDS, Ag is an alternative for Au on many biological samples if P, Cl and S need to be analyzed. Sputtering rate is similar to Au, the SE yield is somewhat lower than for Pt, Au or Ir. The grain sizes is similar or slightly larger than Au, except for samples containing halogens which can cause coarser grains. The Ag coating can tarnish (in the presence of halogens) and are less suitable for long term storage. Excellent low cost coating material for many less demanding imaging applications and table top SEMs.
An additional advantage is that the Ag coating can be dissolved and the sample surface can be studied in the original conditions. Removal of Au, Au/Pd, Pt and Ir coatings is more difficult and involves very harsh chemicals. The Ag coating can be removed with Farmer's reducer (Mixture of Potassium Ferricyanide and Sodium Thiosulfate).


Platinum

Pt has a finer grain size than Au or Au/Pd and is therefore more suitable for higher magnifications. Excellent SE yield. The higher work function results in slower sputtering than Au. Pt tends to be sensitive for “stress cracking” when oxygen is present (oxygen can come from porous samples). More expensive than Au due to higher fabrication costs.


Platinum/Palladium

Pt/Pd alloy (80/20) has a similar grain size and SE yield as pure Pt, but is less senstive to “stress cracking”. Suitable all-round coating material for FESEM applications when thin coatings are used. Best results are achieved when using high resolution sputter coaters


Iridium

Ir exhibits a very fine grain size on virtually all materials and is an excellent all-round fine grain coating material for FESEM applications. It is the material of choice for high and ultra-high resolution FESEM imaging. With the added benefit of being a non-oxidising material and a high SE yield, it is replacing Chromium for high resolution sample coating. It requires the use of a high resolution sputter coater and has lower sputtering rates. The targets are thicker due to fabricated constraints, but overall costs are lower than for Pt or Pt/Pd. Ir is also an excellent alternative material for coating samples which have to be analyzed for carbon by EDX or WDX. A thin layer is enough to creat excellent conductivity and since the material is very rare it hardly interferes with EDX or WDX analysis.


Chromium

Cr has a very fine grain size, especially on semiconductor type materials and has proven to be a useful coating materials for FESEM applications. Cr requires the use of a turbo pumped, high vacuum, high resolution sputter coater with a target shutter since the presence of oxygen (as in standard SEM coaters) causes oxidisation during coating. The Cr on the sample surface will oxidise in air and samples must be viewed immediately after coating. Samples can be stored in high vacuum or in inert gas. Cr has lower sputtering rates and the target tends to heat up. Lower SE yield than Pt, Pt/Pd or Ir. Excellent coating material for high resolution BE imaging of low Z and biological samples.


Tungsten

W is an excellent alternative for ultra-high resolution coating.W has a very fine grain size and tends to be less visible than Cr. W oxidises rapidly, similar to Cr. Low sputtering rates, but due to the high atomic number the SE yield tends to be higher. Samples must be imaged immediately after coating or stored under high vacuum.


Tantalum

Ta is also a candidate for high resolution coating (most refractory and high melting materials exhibit fine grain size). It oxidises quite rapidly, similar to Cr. Low sputtering rates, but due to high atomic number the SE yield tends to be higher. Samples must be imaged immediately after coating or stored under high vacuum.



Palladium

Pd can be used as a lower cost alternative for low to medium magnification ranges. Gives a lower SE signal than Au. When using EDX analysis, Pd can be an alternative.


Nickel

Ni is an alternative coating material for EDX applications and BSE imaging. Not ideal for SE imaging, the coating oxidises slowly. It has a (very) low sputtering rate due to the low work functions and the fact that as a magnetic materials it "short circuits" the magnet in the DC magnetron sputter head with a less dense plasma as a result. In a standard SEM coater, the coating contains a mixture of Ni and Ni-oxide. The Ni coating layer can enhance elements through X-ray fluorescence. If needed, the Ni coating can be removed if needed with a Hydrochloric acid or Nitric acid.


Copper

Cu is an alternative low cost material for EDX applications and BSE imaging. Suitable for low and medium magnification ranges. Lower SE yield. Coatings will slowly oxidize. In a standard SEM coater the coating consists of a mixture of Cu and Cu-oxide. However, it is a low cost alternative for educational applications to demonstrate and to investigate the influence of coating parameters. The Cu coating layer can be used to enhance the analysis of transition materials through X-ray fluorescence. If needed, the copper coating can be removed with Ferricchloride or Nitric Acid.


Titanium

Ti is seldom used as coating material, but has applications where it is chosen to avoid any interference with EDX analysis. Low atomic number gives less interference with BSE imaging. Ti oxidises quite rapidly and samples need to be imaged directly after coating.


Carbon

Carbon is the material of choice for coating non-conductive samples to allow for EDX analysis and BE imaging. It is has a low atomic number, is conductive and is inert at room temperature. It can't be sputtered in DC magnetron sputter coaters; high energy is needed and if sputtered it tends to deposit as DLC material which is non-conductive. Carbon can be used as a target in ion-beam coaters such as the Gatan models 681, 682 and 685. Otherwise it is used in carbon evaporaters to coat SEM samples or to produce carbon support films for TEM.




SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sample storage
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Lab scissors
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Preparation mats & tiles
  Cleaning
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
  Calibration
  Plastic Transfer Pipettes