R D Mathis Tungsten rod evaporation sources
Chromium plated tungsten rod sources
Micro-Electronic evaporation sources
R D Mathis Tungsten rod evaporation sources
compact, efficient way to evaporate tungsten
Introduction
The tungsten rod evaporation sources offer an effective, user friendly way to thermally evaporate tungsten. The tungsten rod evaporation sources are used for depositing thin films of tungsten in high vacuum thin film coating systems.
Due to its high melting point, tungsten is notoriously difficult to evaporate (hence the fact that the majority of thermal evaporation sources are made from tungsten!).
The tungsten rod sources consist of a thicker tungsten rod with thin tungsten wire tightly wrapped around the tungsten rod. The thinner tungsten wire is evaporated of the thicker tungsten rod. The number of wrapped layers of thin tungsten wire and the working length determine the amount of tungsten which can be evaporated from the rod. This evaporation can be used for upwards, sidewards and downwards evaporation if the substrate is not placed directly under the source.
The tungsten rod sources are available in 102, 127 and 203mm length to accommodate the most popular evaporation source holders.
P/N |
Rod L |
Work L |
Rod Ø |
Wire Ø |
Layers |
Volts |
Amps |
Watts |
Temp |
72-F16A |
102mm |
51mm |
2.54mm |
0.51mm |
8 |
1.12 |
148 |
166 |
1500 °C |
72-F16B |
127mm |
76mm |
2.54mm |
0.51mm |
8 |
1.19 |
149 |
177 |
1500 °C |
72-F16C |
127mm |
76mm |
2.54mm |
0.51mm |
12 |
1.3 |
172 |
224 |
1500 °C |
72-F16D |
203mm |
152mm |
2.54mm |
0.51mm |
12 |
3.62 |
223 |
807 |
1500 °C |
Ordering information for R D Mathis tungsten rod evaporation sources.
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