KPFM and EFM test sample
Microscopy Calibration, Test & Reference Standards Overview
EM-Tec SEM Resolution Test Standard
AFM / SPM overview
EM-Tec SEM Resolution Test Standard
AFM / SPM overview
KPFM and EFM test sample
Alternating gold and aluminium lines with gaps
The KPFM & EFM test sample has been specifically designed to test the performance of Kelvin Probe Force Microscopy and Electrostatic Force Microscopy. This practical test sample consists of arrays with alternating aluminium and gold lines deposited on a silicon oxide covered silicon substrate. There are 4 line array pitches: 4, 8, 20 and 40 um with gaps of 0.5-0.8um between the lines. The line height is approx. 35 nm.
Features of the KPFM & EFM test sample:
- Arrays with alternating Al en Au lines
- Line array pitches of 4, 8, 20 and 40 um with a gap of 0.5-08um.
- Line height is approx. 35nm
- Stack is silicon chip on Ø12mm glass disc on Ø15mm metal disc with total height of 1.5mm
- Thin copper wires connected to the Al and Au pads
Specifications of the KPFM & EFM test sample
Product number |
34-033040 |
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Line height |
35 nm |
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Gap width |
0.5 – 0.8 um |
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Line width |
Group |
Pitch |
Aluminium |
Gold |
Large |
40 um |
10 ± 0.5 um |
29 ± 0.5 um |
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Medium |
20 um |
5 ± 0.5 um |
14 ± 0.5 um |
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Small |
10 um |
2 ± 0.5 um |
6 ± 0.5 um |
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Extra small |
4 um |
1 ± 0.5 um |
2 ± 0.5 um |
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Ordering Information for the KPFM & EFM test sample
*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
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