KPFM and EFM test sample
Alternating gold and aluminium lines with gaps


Introduction

The KPFM  & EFM test sample has been specifically designed to test the performance of Kelvin Probe Force Microscopy and Electrostatic Force Microscopy. This practical test sample consists of arrays with alternating aluminium and gold lines deposited on a silicon oxide covered silicon substrate. There are 4 line array pitches: 4, 8, 20 and 40 um with gaps of 0.5-0.8um between the lines. The line height is approx. 35 nm.


Features of the KPFM & EFM test sample:

  • Arrays with alternating Al en Au lines
  • Line array pitches of 4, 8, 20 and 40 um with a gap of 0.5-08um.
  • Line height is approx. 35nm
  • Stack is silicon chip on Ø12mm glass disc on Ø15mm metal disc with total height of 1.5mm
  • Thin copper wires connected to the Al and Au pads

Specifications of the KPFM & EFM test sample

Product number

34-033040

Line height

35 nm

Gap width

0.5 – 0.8 um

Line width

Group

Pitch

Aluminium

Gold

Large

40 um

10 ± 0.5 um

29 ± 0.5 um

Medium

20 um

5 ± 0.5 um

14 ± 0.5 um

Small

10 um

2 ± 0.5 um

6 ± 0.5 um

Extra small

4 um

1 ± 0.5 um

2 ± 0.5 um



Ordering Information for the KPFM & EFM test sample

*Prices without VAT, but within the EU, we have to check for valid VAT-ID.
  
KPFM and EFM test sample with Al and Au line arrays, mounted on 15mm metal AFM disc KPFM and EFM test sample with Al and Au line arrays, mounted on 15mm metal AFM disc
Product # Unit Price* Add to Quote / Order
34-034040 each €545,00
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