Cressington Rotary-Tilting and Rotary-Planetary-Tilting sample stages
Cressington 108 SEM Carbon Coaters
Cressington 108 vacuum pumping system
Cressington MTM-10/20 thickness monitor/controller
Sputter targets for Cressington 108 series
Consumables for Cressington coaters, thickness monitors and pumping systems
Cressington Rotary-Tilting and Rotary-Planetary-Tilting sample stages
Introduction
Motorised Rotary-Tilting (R-T) and Rotary-Planetary-Tilting (RPT) sample stages offer increased uniformity and improved conformal coating of larger samples, high topography samples and multiple samples. They are optionally available for the Cressington coaters:
- RT40 Rotary-Tilting stage for the Cressington 108auto and 108manual sputter coater
- RT100 Rotary-Tilting stage for the 108auto/SE sputter coater or 108carbon/A/SE carbon coater
- RPT Rotary-Planetary-Tilting stage for the 108auto/SE sputter coater or 108carbon/A/SE carbon coater
They are constructed with an aluminium collar and short glass chamber, enabling them to be drop-in replacements for the standard glass chamber. The electric motor and control are placed outside the vacuum. The motorised samples stage include a 5 step speed control up to 120rpm, full rocking tilt of 90 degrees both ways and an integrated tilt-lock lever.
Specification of Cressington RT and RPT stages
Type |
RT40 stage |
RT100 stage |
RPT stage |
Product # |
|||
Compatibility |
108auto |
108auto/SE |
108auto/SE |
Aluminium collar |
Ø120 x 76mm |
Ø150 x 85mm |
Ø150 x 85mm |
Glass chamber |
Ø120 x 44mm |
Ø150 x 65mm |
Ø150 x 65mm |
Movements |
Rotation & tilt |
Rotation & tilt |
Planetary rotation & tilt |
Speed control |
Off + 5 steps to 120 rpm |
Off + 5 steps to 120 rpm |
Off + 5 steps to 120 rpm |
Tilting range |
+/- 90° |
+/- 90° |
+/- 90° |
Tilt-lock |
yes |
yes |
yes |
MTM compatible |
yes |
yes |
yes |
Power requirements |
9V DC / 100-240VAC |
9V DC / 100-240VAC |
9V DC / 100-240VAC |
Cressington RT40 Rotary-Tilting sample stage
19-010220 RT40 rotary-tilting stage (Ø120mm)
The Cressington RT40 Rotary-Tilting sample stage has been designed specifically for the 120mm chambers and is compatible with the 108auto and 108manual SEM sputter coaters. The RT40 sample stage is supplied with a short glass chamber to reach a total height of 120mm. The RT40 rotary tilting stage assembly replaces the Ø120x120mm glass chamber and can be field retrofitted to any existing Cressington 108auto or 108manual sputter coater. It will also fit the JEOL and Agar branded sputter coaters with the Ø120x120mm glass chambers.
The RT40 stage provides near eucentric tilting for 0-90° in both directions. The rotational speed is controlled by a multi-position switch for up to 120rpm. The standard sample table holds 4 of the 12.7mm pin stubs. Other sample tables are optionally available. For precise thickness measurements the MTM-20 thickness controller can be added; the crystal head is at the same height as the sample stubs for increased accuracy. Features and benefits of the RT40 stage are:
- highly uniform and conformal coatings
- better coverage with thinner coatings
- short coating distance with near eucentric tilt
- rocking tilt from 0 to +/- 90°
- fully compatible with sputter coaters with Ø120x120mm chamber
- fully compatible with thickness monitoring
- Incl. 9V power supply (100-240V)
|
|||||||||||
|
|||||||||||||||||
|
|||||||||||||||||
|
|||||||||||||||||
|
|||||||||||||||||
Cressington RT100 Rotary-Tilting sample stage
19-012050 R-T stage (Ø150mm)
The Cressington RT100 Rotary-Tilting stage has been designed for the larger 150mm chambers and is fully compatible with the 108auto/SE sputter coater and the 108carbon/A/SE carbon coater. The R-T stage with the large 100mm diameter platform enables coating of larger samples with increased uniformity. This larger diameter R-T stage is supplied with a 150x65mm glass chamber to reach a total height of 150mm. It can either replace the 150x150mm glass chamber or the 150x150mm glass chamber can be placed on top of the R-T sample stage. The height of the RT100 top plate can be adjusted with the telescopic top plate support. Includes large sample holder plate to accommodate a glass slide, multiple pin stubs or optional sample holders. The rotational speed is controlled by a multi-position switch up to 120rpm. Tilting is in both directions up to 90 degrees and a tilt lock is provided.
- enables uniform coating of large samples
- wide choice of coating distances
- coating of multiple samples
- compatible with 4” wafers
- compatible with optional thickness monitor
- choice of sample holders
- Incl. 9V power supply (100-240V)
|
|||||||||||
|
|||||||||||||||||
|
|||||||||||||||||
Cressington RPT Rotary-Planetary-Tilting sample stage
19-012080 R-P-T stage (Ø150mm)
The Cressington RPT Rotary-Planetary-Tilting stage has been designed for the larger 150mm chambers and is fully compatible with the 108auto/SE sputter coater and the 108carbon/A/SE carbon coater. The 4 planetary sample holder spin on their axis, whilst the larger plate holding the 4 sample holders rotates as well. The RPT stage with its 4 planetary sample holders provide excellent conformal and uniform coating of highly topographical samples. This larger diameter RPT stage is supplied with a 150x65mm glass chamber to reach a total height of 150mm. It can either replace the 150x150mm glass chamber or the 150x150mm glass chamber can be placed on top of the RPT sample stage. The height of the RPT top plate can be adjusted with the telescopic top plate support. Includes 4 sample holders, where each sample holder can hold up 6 standard 12.7mm pin stubs. The rotational speed is controlled by a multi-position switch up to 120rpm. Tilting is in both directions up to 90 degrees and a tilt lock is provided.
- enables conformal and uniform coating
- wide choice of coating distances
- coating of up to 24 samples
- compatible with 4” wafers
- compatible with optional thickness monitor
- choice of sample holders
- optional adapter plates for large samples
- Incl. 9V power supply (100-240V)
|
|||||||||||||||
|
|
|
|
|
|
|
|
|
|
