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Cressington Rotary-Tilting and Rotary-Planetary-Tilting sample stages



Introduction

Motorised Rotary-Tilting (R-T) and Rotary-Planetary-Tilting (RPT) sample stages offer increased uniformity and improved conformal coating of larger samples, high topography samples and multiple samples. They are optionally available for the Cressington coaters:

They are constructed with an aluminium collar and short glass chamber, enabling them to be drop-in replacements for the standard glass chamber. The electric motor and control are placed outside the vacuum. The motorised samples stage include a 5 step speed control up to 120rpm,  full rocking tilt of 90 degrees both ways and an integrated tilt-lock lever.


Specification of Cressington RT and RPT stages

Type

RT40 stage

RT100 stage

RPT stage

Product #

19-010220

19-012050

19-012080

Compatibility

108auto
108manual

108auto/SE
108carbon/A/SE

108auto/SE
108carbon/A/SE

Aluminium collar

Ø120 x 76mm

Ø150 x 85mm

Ø150 x 85mm

Glass chamber

Ø120 x 44mm

Ø150 x 65mm

Ø150 x 65mm

Movements

Rotation & tilt

Rotation & tilt

Planetary rotation & tilt

Speed control

Off  + 5 steps to 120 rpm

Off  + 5 steps to 120 rpm

Off  + 5 steps to 120 rpm

Tilting range

+/- 90°

+/- 90°

+/- 90°

Tilt-lock

yes

yes

yes

MTM compatible

yes

yes

yes

Power requirements

9V DC / 100-240VAC

9V DC / 100-240VAC

9V DC / 100-240VAC

 

Cressington RT40 Rotary-Tilting sample stage

           108 rotary-tilting stage (Ø120mm)  for 108auto sputter coater incl. 44mm short glass chamber
           19-010220 RT40 rotary-tilting stage (120mm)

The Cressington RT40 Rotary-Tilting sample stage has been designed specifically for the 120mm chambers and is compatible with the 108auto and 108manual SEM sputter coaters. The RT40 sample stage is supplied with a short glass chamber to reach a total height of 120mm. The RT40 rotary tilting stage assembly replaces the Ø120x120mm glass chamber and can be field retrofitted to any existing Cressington 108auto or 108manual sputter coater. It will also fit the JEOL and Agar branded sputter coaters with the Ø120x120mm glass chambers.
The RT40 stage provides near eucentric tilting for 0-90° in both directions. The rotational speed is controlled by a multi-position switch for up to 120rpm. The standard sample table holds 4 of the 12.7mm pin stubs. Other sample tables are optionally available. For precise thickness measurements the MTM-20 thickness controller can be added; the crystal head is at the same height as the sample stubs for increased accuracy. Features and benefits of the RT40 stage are:

  • highly uniform and conformal coatings
  • better coverage with thinner coatings
  • short coating distance with near eucentric tilt
  • rocking tilt from 0 to +/- 90°
  • fully compatible with sputter coaters with Ø120x120mm chamber
  • fully compatible with thickness monitoring
  • Incl. 9V power supply (100-240V)
Quotation and order information for Cressington RT40 sample stage
Product # Unit Name Quote
19-010220 each 108 rotary-tilting stage (120mm) for 108auto sputter coater incl. 44mm short glass chamber

108 R-T sample holder for 4 x 12.7mm pin stubs, 30mm
Product # Unit Price* Add to Quote / Cart
19-010221 108 R-T sample holder for 4 x 12.7mm pin stubs, 30mm
Qty:

each €195,00

108 R-T sample holder for 6 x 12.7mm or 3x 25.4 pin stubs, 40mm
Product # Unit Price* Add to Quote / Cart
19-010222 108 R-T sample holder for 6 x 12.7mm or 3x 25.4 pin stubs, 40mm
Qty:

each €195,00

108 R-T sample holder for 4 x 15mm Hitachi stubs, 38mm
Product # Unit Price* Add to Quote / Cart
19-010223 108 R-T sample holder for 4 x 15mm Hitachi stubs, 38mm
Qty:

each €195,00

108 R-T sample holder for 6x 9.5mm JEOL stubs, 35mm
Product # Unit Price* Add to Quote / Cart
19-010224 108 R-T sample holder for 6x 9.5mm JEOL stubs, 35mm
Qty:

each €195,00


Cressington RT100 Rotary-Tilting sample stage

             R-T stage for 108/SE coaters (Ø150mm), incl. 65mm short glass chamber
               19-012050 R-T stage (Ø150mm)            

The Cressington RT100 Rotary-Tilting stage has been designed for the larger 150mm chambers and is fully compatible with the 108auto/SE sputter coater and the 108carbon/A/SE carbon coater. The R-T stage with the large 100mm diameter platform enables coating of larger samples with increased uniformity. This larger diameter R-T stage is supplied with a 150x65mm glass chamber to reach a total height of 150mm. It can either replace the 150x150mm glass chamber or the 150x150mm glass chamber can be placed on top of the R-T sample stage. The height of the RT100 top plate can be adjusted with the telescopic top plate support.  Includes large sample holder plate to accommodate a glass slide, multiple pin stubs or optional sample holders. The rotational speed is controlled by a multi-position switch up to 120rpm. Tilting is in both directions up to 90 degrees and a tilt lock is provided.

  • enables uniform coating of large samples
  • wide choice of coating distances
  • coating of multiple samples
  • compatible with 4” wafers
  • compatible with optional thickness monitor
  • choice of sample holders
  • Incl. 9V power supply (100-240V)
Quotation and order information Cressington RT100 rotary tilting sample stage and holders
Product # Unit Name Quote
19-012050 each R-T stage for 108/SE coaters (150mm), incl. 65mm short glass chamber

R-T sample holder plate for 3 x geological slides up to 28x48mm
Product # Unit Price* Add to Quote / Cart
19-012053 R-T sample holder plate for 3 x geological slides up to 28x48mm
Qty:

each €380,00

R-T sample holder plate for 4inch wafer
Product # Unit Price* Add to Quote / Cart
19-012054 R-T sample holder plate for 4inch wafer
Qty:

each €380,00





Cressington RPT Rotary-Planetary-Tilting sample stage

                         
                         R-P-T stage for 108/SE coaters (Ø150mm), incl. 65mm short glass chamber
                            19-012080 R-P-T stage (Ø150mm)

The Cressington RPT Rotary-Planetary-Tilting stage has been designed for the larger 150mm chambers and is fully compatible with the 108auto/SE sputter coater and the 108carbon/A/SE carbon coater. The 4 planetary sample holder spin on their axis, whilst the larger plate holding the 4 sample holders rotates as well. The RPT stage with its 4 planetary sample holders provide excellent conformal and uniform coating of highly topographical samples. This larger diameter RPT stage is supplied with a 150x65mm glass chamber to reach a total height of 150mm. It can either replace the 150x150mm glass chamber or the 150x150mm glass chamber can be placed on top of the RPT sample stage. The height of the RPT top plate can be adjusted with the telescopic top plate support.  Includes 4 sample holders, where each sample holder can hold up 6 standard 12.7mm pin stubs. The rotational speed is controlled by a multi-position switch up to 120rpm. Tilting is in both directions up to 90 degrees and a tilt lock is provided.

  • enables conformal and uniform coating
  • wide choice of coating distances
  • coating of up to 24 samples
  • compatible with 4” wafers
  • compatible with optional thickness monitor
  • choice of sample holders
  • optional adapter plates for large samples
  • Incl. 9V power supply (100-240V)
Quotation and order information for Cressington RPT sample stage and holders
Product # Unit Name Quote
19-012080 each R-P-T stage for 108/SE coaters (150mm), incl. 65mm short glass chamber

RPT sample holder for 6 x standard 12.7mm pin stubs
Product # Unit Price* Add to Quote / Cart
19-012081 RPT sample holder for 6 x standard 12.7mm pin stubs
Qty:

each €195,00

RPT sample holder for 25mm / 1inch mounts
Product # Unit Price* Add to Quote / Cart
19-012082 RPT sample holder for 25mm / 1inch mounts
Qty:

each €195,00

RPT sample holder for 32mm / 1-1/4inch mounts
Product # Unit Price* Add to Quote / Cart
19-012083 RPT sample holder for 32mm / 1-1/4inch mounts
Qty:

each €195,00

RPT sample holder for 4x 9.5mm or 12.2mm JEOL sample stubs
Product # Unit Price* Add to Quote / Cart
19-012084 RPT sample holder for 4x 9.5mm or 12.2mm JEOL sample stubs
Qty:

each €195,00

RPT sample holder for 3x 15mm Hitachi M4 mounts
Product # Unit Price* Add to Quote / Cart
19-012085 RPT sample holder for 3x 15mm Hitachi M4 mounts
Qty:

each €195,00

Adapter plate holder for 2x microscope slides up to 25.4 x 76.2mm (1inch x 3inch)
Product # Unit Price* Add to Quote / Cart
19-012072 Adapter plate holder for 2x microscope slides up to 25.4 x 76.2mm (1inch x 3inch)
Qty:

each €300,00

Adapter plate holder for 3x geological slides up to 48x28mm
Product # Unit Price* Add to Quote / Cart
19-012073 Adapter plate holder for 3x geological slides up to 48x28mm
Qty:

each €380,00

Adapter plate holder for 4inch wafer
Product # Unit Price* Add to Quote / Cart
19-012074 Adapter plate holder for 4inch wafer
Qty:

each €380,00



 



SEM Supplies

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Calibration

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AFM / SPM

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FIB Supplies


  FIB Lift-out grids
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LM


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