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MAG*I*CAL traceable TEM calibration standard

           TEM image of four identical structures with alternating Si/SiGe lines
           TEM image of four identical structures
            with alternating Si/SiGe lines.

           Diagram of the four regions of the calibration structures
              Diagram of the four regions of the
              calibration structures

Optical image of the four regions of the calibration structures
Optical image of the four regions of
the calibration structures


Introduction


An accurately calibrated TEM is imperative for generating correct imaging data.  With the traceable MAG*I*CAL calibration standard, the TEM can be accurately calibrated. The MAG*I*CAL traceable TEM calibration standard consists of 4 sets of 5 SiGe layers with a thickness of ~10nm, alternating with pure silicon layers with a thickness of ~13nm.  The total thickness of the set of alternating layers is  ~100nm. The distance between each set of 5 layers is ~1.2µm.  The epitaxial layers are grown using an MBE (Molecular Beam Epitaxy) process on a single crystal silicon {001} substrate.  The finished calibration standard is a cross-sectioned TEM calibration sample with four regions where the calibration lines can be imaged.
The unique MAG*I*CAL TEM magnification calibration standard can be used to calibrate:

  •  The TEM over the entire range from 1000x up to 1,000,000x magnification with the alternating lines
  •  Camera constant calibration using the Si single crystal
  •  Image / diffraction pattern rotation calibration using the Si single crystal area

The four sets of alternating layers of Si and SiGe provide light and dark lines with good contrast. These four sets of the alternating layers are calibrated using  a high resolution transmission electron microscope (HR-TEM) with reference to the {111} lattice space of silicon (0.3135428nm) measured on the single crystal substrate of the MAG*I*CAL calibration standard. This method provides unbroken traceability of a fundamental constant of nature; the lattice constant of silicon.

Supplied within a 3mm titanium disc, including calibration manual

Traceability of the MAG*I*CAL calibration reference standard
The MAG*I*CAL calibration reference standard is manufactured from a single crystal silicon wafer, and so incorporates a fundamental constant of nature into the standard itself; the crystal lattice constant of silicon. All calibration markings on the standard are directly referenced to this natural constant. The calibrated values can be verified by the user by observing the crystal lattice image of the silicon substrate and validating the calibrated values.
Natural Metrology Institutes (NMI’s) such as NIST in the USA, NPL in the UK and PTB in Germany, etc., certify measurements as traceable to fundamental constants of nature, but they do not certify natural constants. The MAG*I*CAL calibration reference standard does not require NMI certification since the calibration is directly traceable to a natural constant available on the standard itself (the crystal lattice spacing of silicon) and all calibrated values can be verified by the user. The crystal lattice spacing is an intrinsic property of a material. For pure silicon, the crystal lattice spacing has been well characterised and documented by the scientific community. It is known to better than 8 decimal places: 0.313560136 nm. This value can be obtained from a recent CRC Handbook of Chemistry and Physics and many other references.

 


Kikuchi pattern from the Si single crystal for alignment          
Kikuchi pattern from the Si single crystal
for alignment
Lattice image of the Si single crystal
Lattice image of the Si single crystal

 

Ordering Information

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MAG*I*CAL traceable TEM calibration standard MAG*I*CAL traceable TEM calibration standard

Product # Unit Price* Add to Quote / Cart
33-001005 each €1190,00
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SEM Supplies

TEM Supplies

Calibration

Sample Preparation

AFM / SPM

  SEM Sample Stubs
  Sample Stub Adapters
  SEM Stage Adapters
  SEM Sample Holders
  Filaments/Cathodes
  Silicon Finder Grid
  Gatan 3View Pins
  FEI Volumescope Pins
  SEM Stub Storage Boxes
  Phenom Supplies
  JEOL NeoScope Supplies
  Hitachi TM series Supplies
  Field & lab sampler kits

Instruments


  Acoustic Enclosures
  Critical Point Dryers
  Cressington SEM Coaters
  HI-Res IR Chamberscope
  TEM Sample Prep
  TEM Grids
  TEM Support Films
  Graphene Films
  Grid Storage Boxes
  Cryo Grid Box
  TEM sample staining
  Filaments/Cathodes
  Cryo Pin for U-M
  Eyelash manipulators

FIB Supplies


  FIB Lift-out grids
  FIB low profile stubs
  FIB grid holders
  FIB pre-tilt holders
  FIB Grid Boxes
  SEM / FIB Magn. Calib.
  SEM Res. Test Spec.
  EDS / WDS Calibration
  TEM Calibration
  AFM / SPM Calibration
  LM Magn. Calibration

Vacuum Supplies


  Bullseye Vacuum Gauges
  D215V Vacuum Controller
  D801W Vacuum Gauges
  Quick-check Gauges
  KF/NW Vacuum Parts
  Vacuum oil and grease
  Vacuum sample storage
  Evaporation baskets
  Quartz QCM Crystals
  Sputter Targets
  Carbon Rods & Fibers
  Quartz QCM Crystals
  Supports & Substrates
  SEM Preparation Stands
  Tweezers
  Probes & Picks
  Lab scissors
  Applicators & Swabs
  Plastic Transfer Pipettes
  Cutting Tools
  Conductive Paint/Cement
  Conductive Tapes &Tabs
  Non-conductive Adhesives
  Stainless Steel Mesh
  Sample Storage
  Tools
  Preparation mats & tiles
  Cleaning
  Diamond Polishing Paste
  AFM/SPM Discs
  AFM/SPM Holders
  AFM/SPM Disc Storage
  Cantilever Tweezers
  AFM/SPM Discs Tweezers
  Mica Discs
  HOPG Substrates


LM


  Correlative Cover Slips
  Glass Microscope Slides
  Glass Cover Slips
  Quartz Microscope Slides
  Quartz Cover Slips
  Black metal slides
  Slide storage boxes
  Calibration
  Plastic Transfer Pipettes